Agilent Technologies 16440A SMUの取扱説明書

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  • Agilent Technologies 16440A SMU - page 1

    User ’ s Guide Agilent 16 440A SMU/P ulse Ge nerato r Selec tor Agilent Part No. 16440-900 00 Printed in Japan January 2000 Edition 4 ...

  • Agilent Technologies 16440A SMU - page 2

    2 A gilent 16440A User ’s Guide, Edition 4 Legal Notice The information con tained in this docum ent is subject to chang e with out notice. Cop yrigh t © 1 994 - 2 00 0 Agil ent T ech nolo gie s This document contai ns inform ation w hich is protected by copyrig ht. All righ ts are reserved. Reproduction, adaptation, or translation with out prio ...

  • Agilent Technologies 16440A SMU - page 3

    A gilent 16440A Us er ’ s Guide, E dition 4 3 T o the extent allowed by local law , the above warranties are excl usive and no other warrant y or condition, w heth er written or oral, is expressed or implied an d Agilen t T echnologies specifically disclaim an y im plied warranties or conditions of merchan tability , sat isfactory qualit y , and ...

  • Agilent Technologies 16440A SMU - page 4

    4 A gilent 16440A User ’ s Guide, Edition 4 • GROUND THE INSTRUMENT This is Safety Class I instrum ent. T o min imize sh ock hazard, the instrum ent chassis and cabinet m ust be connected to an electrical g round. T he pow er terminal an d the power cable mu st meet Int ernational Electrotechnical Comm ission (IEC) safet y standards. • DO NOT ...

  • Agilent Technologies 16440A SMU - page 5

    A gilent 16440A Us er ’ s Guide, E dition 4 5 • Safety Symbols The general definitions of safety s ym bols used on equipmen t or in manu als are listed below . Instruction m anual sy m bol: the product will be m arked with this sy mbol w hen it is necessary for the user to refer to the instruct ion manu al in order to protect against dam age to ...

  • Agilent Technologies 16440A SMU - page 6

    6 A gilent 16440A User ’ s Guide, Edition 4 • Herstellerbescheinigung GE Ä USCHEMISSION Lpa < 70 dB am A rbeitsplatz normaler Betrieb nach DIN 45635 T . 19 • Manufactur er’s Declara tion ACOUSTIC NOISE EMISSION Lpa < 70dB operator po sition normal operation per ISO 7779 Printing History Edition 1: February 1994 Edition 2: April 1995 ...

  • Agilent Technologies 16440A SMU - page 7

    A gilent 16440A Us er ’ s Guide, E dition 4 User's Guide ...

  • Agilent Technologies 16440A SMU - page 8

    2 A gilent 16440 A User ’ s Guide, E dition 4 User's Guide Agilen t 16440A SMU/Pulse Generator Selector is one of the accessories available for Agilent 4155/41 56 Semiconduct or Parameter Analy zers. T he select or is for automaticall y sw itching the unit (SMU or PGU) that is connected to a DUT pin according to the state (stress force state ...

  • Agilent Technologies 16440A SMU - page 9

    A gilent 16440A Us er ’ s Guide, E dition 4 3 User's Guide Introduction Introduction The 16440 A selector contains the follow ing accessories: NOTE Inspecting the 16440A upon Receiving When the 16440A arrives at you r site, make su re that nothing is miss ing or damaged. Unpack the carton , then check the contents agai nst figu re and table ...

  • Agilent Technologies 16440A SMU - page 10

    4 A gilent 16440 A User ’ s Guide, E dition 4 User's Guide Operation Operation This section describes the operating theory of the selector . Agilen t 4155/4156 can control the s elector to automatically sw itch th e unit (SMU or PGU) that is connected to a DUT pin according to the state (stress force state or measu rement state). This is use ...

  • Agilent Technologies 16440A SMU - page 11

    A gilent 16440A Us er ’ s Guide, E dition 4 5 User's Guide Oper ation The following figure sh ows a sim ple circuit diagram of the selector (selector expander). The CH 1 and CH 3 circuits are different from the C H 2 and CH 4 circuits. Each channel has one mechan ical relay for SMU and one m echanical relay for PGU, but the CH 1 and CH 3 cir ...

  • Agilent Technologies 16440A SMU - page 12

    6 A gilent 16440 A User ’ s Guide, E dition 4 User's Guide Operation The switchi ng state of a channel is in dicated by the green LEDs on the selector front panel. The follow ing table show s the relation of th e relays and the LE Ds for each swit ching state. The "P GU open" state is usefu l if a lot of sw itching needs to be perf ...

  • Agilent Technologies 16440A SMU - page 13

    A gilent 16440A Us er ’ s Guide, E dition 4 7 User's Guide Installation Installation This section describes how to attach the selector to Agil ent 16442A test fixture or to a shielding box, and how to connect it to Ag ilent 4155/415 6. T o Attach the Sel ector to T est Fixture Y ou can attach your selector to the 16442A test fix ture. Y ou n ...

  • Agilent Technologies 16440A SMU - page 14

    8 A gilent 16440 A User ’ s Guide, E dition 4 User's Guide Installation The following steps apply w hen usi ng tw o selectors: 5. Place the second selector on your workbench . Place the selector and the test fixture on top of the secon d selector . 6. Position a plate on both si des. 7. Attach each plate usi ng the three fl athead screws s u ...

  • Agilent Technologies 16440A SMU - page 15

    A gilent 16440A Us er ’ s Guide, E dition 4 9 User's Guide Installation If you u se the 16441A R-box, attach the R- Box to the selector as show n below: ...

  • Agilent Technologies 16440A SMU - page 16

    10 A gilent 16440A Use r ’ s Guide, E dition 4 User's Guide Installation T o Attach the Sel ector to Shielding Bo x Y ou can attach your selector to a shielding box. Y ou need a standard screw driver . The following figure sh ows the s pacing of the 16440A screw holes. Y ou n eed to prepare four screws and nu ts to match th e screw holes . ...

  • Agilent Technologies 16440A SMU - page 17

    A gilent 16440A Us er ’ s Guide, E dition 4 1 1 User's Guide Installation If you u se two selectors, connect selectors before attaching to the sh ielding box, as show n below: 1. Place the selector on your w orkbench. 2. Place the second selector on top of the selector . 3. Position a plate on both si des. 4. Attach each plate usi ng the thr ...

  • Agilent Technologies 16440A SMU - page 18

    12 A gilent 16440A Use r ’ s Guide, E dition 4 User's Guide Installation Attach the s elector to the shielding box as sh own below : 1. Attach an ang le bracket to each side of the selector , using th e screws s upplied. 2. Place the selector(s) on the side panel of the sh ield ing b ox. 3. Position four nuts on the in side panel of the sh i ...

  • Agilent Technologies 16440A SMU - page 19

    A gilent 16440A Us er ’ s Guide, E dition 4 13 User's Guide Installation If you u se the 16441A R-box, attach the R- Box to the selector on the shielding box as show n below: ...

  • Agilent Technologies 16440A SMU - page 20

    14 A gilent 16440A Use r ’ s Guide, E dition 4 User's Guide Installation Connecting the Selector to the 4155/ 4156 • Connecting two selectors If you us e two selectors, connect the Control Output term inal of the selector to the Control Input term inal of the second selector us ing a 40 cm control cable as show n below . ...

  • Agilent Technologies 16440A SMU - page 21

    A gilent 16440A Us er ’ s Guide, E dition 4 15 User's Guide Installation • Connecting the selector to the 4155/41 56 T urn off the 4155/415 6 and 41501 before c onnecting the instrum ents. Then connect as show n below . 41501 4155/4156 16442A Test Fixture 16440A Selector 1 2 3 4 Inst rum ent T ermin al 16440A Te r m i n a l Cable 41501 T o ...

  • Agilent Technologies 16440A SMU - page 22

    16 A gilent 16440A Use r ’ s Guide, E dition 4 User's Guide Maintenan ce Maintenance This section provides the follow ing m aintenan ce information : • Cle aning • Servicing Cleaning the Selector T o maintain hig h performa nce, the selector must be kept clean. Oil, perspiration, hair , dust, and dirt will degrade the board insu lation, ...

  • Agilent Technologies 16440A SMU - page 23

    A gilent 16440A Us er ’ s Guide, E dition 4 17 User's Guide Maintena nce Circuit Block D iagram ...

  • Agilent Technologies 16440A SMU - page 24

    18 A gilent 16440A Use r ’ s Guide, E dition 4 User's Guide Maintenan ce Repl aceab le Pa rts When soldering, use low hy drochloric acid solder (Agilen t part num ber: 8090-0433) to prevent the flux in the solder from spreading unnecessarily, and make sure that adjacent terminals are not bridged. A fter soldering, m ake sure that there are n ...

  • Agilent Technologies 16440A SMU - page 25

    A gilent 16440A Us er ’ s Guide, E dition 4 19 User's Guide Maintena nce R13 0698-0085 Resistor 2.61 k W , 1% R15 0757-0279 Resistor 3.16 k W , 1% CR1 1901-0050 Diode CR2 1901-0050 Diode CR3 1901-0050 Diode CR4 1901-0050 Diode L1 9140-0210 Inductor 100 m H ±5% C1 0180-3468 Capacitor 47 m F 50 V CP1 1990-1625 Opto-isolator CP2 1990-1625 Opto ...

  • Agilent Technologies 16440A SMU - page 26

    20 A gilent 16440A Use r ’ s Guide, E dition 4 User's Guide Specifications Specifications The "supplemental inf ormation" and "typical" entries, in the f ollowing specifications are not w arranted, but provide useful informat ion about the functions and performance of th e instrum ents. The following specifications data i ...

  • Agilent Technologies 16440A SMU - page 27

    A gilent 16440A Us er ’ s Guide, E dition 4 21 User's Guide Specifications • Accessories (fu rnished). See Section 1 for details. • Option 001 • 1.5 m control cable (Agilent part nu mber 04155-61612) • 40 cm triaxial cable (Agi lent part num ber 04155 -61605) • Option 002 • 3.0 m control cable (Agilent part nu mber 04155-6161 1) ...

  • Agilent Technologies 16440A SMU - page 28

    22 A gilent 16440A Use r ’ s Guide, E dition 4 User's Guide Specifications Supplemental Informati on The following reference data is specified at 23 ± 5 ° C (73 ± 9 ° F) and 50 % relative hum idity . • SMU channel Leakage current less than 100 fA at 100 V Residual resistance 0.2 W typical S tray capacitance (for ce comm on) 0.3 pF typi ...

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